TCU (Temp Control Unit)
Summary
As part of the Pre-process equipment during the LCD manufacturing process, it is a device that constantly controls the temperature of the irregular substrate before the exposure equipment is charged.
Characteristic
The equipment consists of TCU and RFU, and ACU controls the temperature and air flow to supply AIR with constant temperature to each unit, and precise temperature control is possible.
Specification
- Temperature range : 20℃~25℃
- Air volume : 60~200 CMM
- Temperature Control Accuracy : ±0.05℃
- Power : 3상 208V 60/50Hz
- Main part : Frozen Unit, Heater, Blower, ULPA Filter
- Safety device : Prevention of overheating of temperature, Overload blocking, Leak detection, Abnormal detection of freezing temperature, Detecting refrigerant high / low pressure abnormality
