工程及装备

General Specification

  • DI & N2 Gun
    : at front Sink “R” & “L” of
    Tank cabinet with circulating piping
  • Exhaust hood & Manometer : Main body
  • Front Safety Sensor
  • LCSS Unit
  • Hot DIW Generator : Rear Area
  • Control Panel : PLC control, Electric Parts, etc.

Process Bath Configuration

  • #1. Wet Loader
  • #2 ~ #3. Chemical #1 & #2 Bath
  • #4. Rinse #1 Bath
  • #5 ~ #6. Chemical #3 & #4 Bath
  • #7. Rinse #2 Bath
  • #8. Chemical #5 Bath
  • #9 ~ #10. Rinse #3 ~ #4 Bath
  • #11. Hot DIW Dry
  • #12. Blower Dryer

Transfer Mechanism

  • Robot Moving range
    Robot #1 : #1. Wet Loader ↔ #4. Rinse #1 Bath
    Robot #2 : #4. Rinse #1 Bath ↔ #9. Rinse #3 Bath
    Robot #3 : #9. Rinse #3 Bath ↔ #12. Blower Dryer
  • Safety Interlock Sensor
    : Up/Down, Right/Left, Wafer Chuck, Movement